From pradeep.nataraj at gmail.com Thu May 3 14:12:37 2012 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Thu, 3 May 2012 14:12:37 -0700 Subject: removed reservation free after 3:30 today Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhaydon at stanford.edu Wed May 16 13:51:41 2012 From: jhaydon at stanford.edu (Jim Haydon) Date: Wed, 16 May 2012 13:51:41 -0700 Subject: 2% silane bottle change Message-ID: <4FB4135D.6020609@stanford.edu> STS dep users I plan to change the 2% Silane tomorrow 5/17 it probably won't last the weekend. Silane will not be available for approximately 24 hrs while it under goes a leak check. We are no longer able to just switch bottles like we used to. Sorry for this short notice and I will try to give more warning next time. Jim From haiwei at stanford.edu Sun May 20 10:49:57 2012 From: haiwei at stanford.edu (Hai Wei) Date: Sun, 20 May 2012 10:49:57 -0700 Subject: STS free from 1pm to 9pm today Message-ID: sample not ready. EOM From pradeep.nataraj at gmail.com Tue May 22 08:15:26 2012 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Tue, 22 May 2012 08:15:26 -0700 Subject: clean cycle started due to NH3 gas and particles Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From nperez at stanford.edu Thu May 31 15:27:50 2012 From: nperez at stanford.edu (Jeannie Perez) Date: Thu, 31 May 2012 15:27:50 -0700 Subject: Below are results from today's tests Message-ID: <4FC7F066.3040800@stanford.edu> I ran six passes through STS PECVD, Dual frequency nitride is still NOT working correctly. We are up for Low Frequency oxides and High Frequency nitride. In the pass I've ran recipes before where everything seem to work and than STS PECVD started having errors so again this may still be intermittent problems. Stay with the system while processing. Low Frequency oxide deposition rate was 393A / min. with the index of refraction 1.47. NORMAL!!!!! High Frequency Nitride deposition rate was 99A / min with the index of refraction 2.06, NORMAL!!!! The MFC for nitrogen is sitting next to the Argon toggle. Please do NOT touch this MFC, it is very sensitive. Regards, Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: