Just a reminder on New Recipes at STS PECVD to Use with High Frequency

Jeannie Perez nperez at stanford.edu
Thu Nov 29 13:35:47 PST 2012


On 11/29/2012 8:07 AM, jperez at snf.stanford.edu wrote:
Here are the recipes to use or copy from.
hifrqcln= etch back
hfoxcoat= 1 micron coat
hfnicoat= 2500 coat
std_hfox
std_hfni
DO NOT USE LOW FREQUENCY!



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