STS PECVD Clean
nperez at stanford.edu
Fri Nov 30 13:38:00 PST 2012
I know it's been a long time using STS, but the Clean cycle still has
six or seven steps. The recipes for the etch back, coating the platen
and if your doing nitride have been changed.
I've already sent out the recipe names and also have put them on Coral.
If you look at the bottom of some of the reason log sheets you'll also
see the new recipe names for clean.
If you already have existing High Frequency recipes they are still good.
Still do NOT use Low Frequency,
More information about the sts