From pindermu at snf.stanford.edu Wed Dec 6 11:52:15 2000 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Dec 6, 2000 11:52:15 PM Subject: Shutdown stsetch: Turbo down at 11:50 pm Pierre Message-ID: From pindermu at snf.stanford.edu Thu Dec 7 12:04:57 2000 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Dec 7, 2000 12:04:57 AM Subject: Problem stsetch: polymer deposition on backside of wafers Message-ID: I noticed that with the SMOODEEP program and the holder, there is some deposition (of polymer?) on the back of the wafers. Pierre From booth at snf.stanford.edu Thu Dec 7 07:10:09 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 7, 2000 7:10:09 AM Subject: Shutdown stsetch: Turbo down at 11:50 pm Pierre Message-ID: restarted system & removed carrier from LoadLock. From ukris at snf.stanford.edu Thu Dec 7 07:26:59 2000 From: ukris at snf.stanford.edu (ukris at snf.stanford.edu) Date: Dec 7, 2000 7:26:59 PM Subject: Problem stsetch: Photoresist in chamber Message-ID: From booth at snf.stanford.edu Sun Dec 10 09:34:34 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 10, 2000 9:34:34 AM Subject: Problem stsetch: Photoresist in chamber Message-ID: not an etcher problem. From booth at snf.stanford.edu Sun Dec 10 09:35:02 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 10, 2000 9:35:02 AM Subject: Problem stsetch: polymer deposition on backside of wafers Message-ID: From davehong at snf.stanford.edu Tue Dec 12 01:50:34 2000 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Dec 12, 2000 1:50:34 AM Subject: Problem stsetch: turbo pump spun down Message-ID: The turbo pump is down and my wafer is still inside the process chamber. I have left a wafer holder on the machine, please put the wafer in the holder. Thank you. From davehong at snf.stanford.edu Tue Dec 12 01:50:53 2000 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Dec 12, 2000 1:50:53 AM Subject: Shutdown stsetch: Message-ID: From booth at snf.stanford.edu Tue Dec 12 07:32:13 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 12, 2000 7:32:13 AM Subject: Shutdown stsetch: cleared Message-ID: Restarted system. unloaded wafer into LoadLock. From booth at snf.stanford.edu Tue Dec 12 07:57:14 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 12, 2000 7:57:14 AM Subject: Problem stsetch: turbo pump spun down Message-ID: restarted system. From dtchang at snf.stanford.edu Thu Dec 14 10:55:18 2000 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Dec 14, 2000 10:55:18 PM Subject: Shutdown stsetch 2000-12-14 22:55:17: Message-ID: Loaded wafer, could not strike a plasma, unloaded wafer. When wafer was unloaded, one of ceramic arms was on top of wafer. It must have broken off sometime during the run. From dtchang at snf.stanford.edu Thu Dec 14 10:56:19 2000 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Dec 14, 2000 10:56:19 PM Subject: Problem stsetch 2000-12-14 22:56:18: Message-ID: Loaded wafer, could not strike plasma. When wafer was unloaded, one of the ceramic arms came out with the wafer. It must have broken off sometime during the run. From cbaxter at snf.stanford.edu Mon Dec 18 07:07:12 2000 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 18, 2000 7:07:12 PM Subject: Shutdown stsetch 2000-12-14 22:55:17: changed all 4 set of ceramic pins Message-ID: From cbaxter at snf.stanford.edu Mon Dec 18 07:08:29 2000 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 18, 2000 7:08:29 PM Subject: Problem stsetch 2000-12-14 22:56:18: changed all 4 set of ceramic pins Message-ID: chamber still need to be condition before using.. From cbaxter at snf.stanford.edu Mon Dec 18 08:33:47 2000 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 18, 2000 8:33:47 PM Subject: Shutdown stsetch 2000-12-18 20:33:31: rf won't turn on ...... Message-ID: