Problem stsetch: polymer deposition on backside of wafers

pindermu at snf.stanford.edu pindermu at snf.stanford.edu
Thu Dec 7 12:04:57 PST 2000


I noticed that with the SMOODEEP program and the holder, there is some deposition (of polymer?) on the back of the wafers.
Pierre




More information about the stsetch-pcs mailing list