Shutdown stsetch: Turbo down at 11:50 pm Pierre
booth at snf.stanford.edu
booth at snf.stanford.edu
Thu Dec 7 07:10:09 PST 2000
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Shutdown stsetch: Turbo down at 11:50 pm Pierre
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restarted system & removed carrier from LoadLock.
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Shutdown stsetch: Turbo down at 11:50 pm Pierre
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Problem stsetch: Photoresist in chamber
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