Shutdown stsetch 2000-12-14 22:55:17:
dtchang at snf.stanford.edu
dtchang at snf.stanford.edu
Thu Dec 14 10:55:18 PST 2000
Loaded wafer, could not strike a plasma, unloaded wafer. When wafer was unloaded, one of ceramic arms was on top of wafer. It must have broken off sometime during the run.
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