Shutdown stsetch 2000-12-14 22:55:17:

dtchang at snf.stanford.edu dtchang at snf.stanford.edu
Thu Dec 14 10:55:18 PST 2000


Loaded wafer, could not strike a plasma, unloaded wafer.  When wafer was unloaded, one of ceramic arms was on top of wafer.  It must have broken off sometime during the run. 




More information about the stsetch-pcs mailing list