Problem stsetch 2000-12-14 22:56:18:

dtchang at snf.stanford.edu dtchang at snf.stanford.edu
Thu Dec 14 10:56:19 PST 2000


Loaded wafer, could not strike plasma.  When wafer was unloaded, one of the ceramic arms came out with the wafer.  It must have broken off sometime during the run.




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