Shutdown stsetch: I guess it is pump failure

sanli at snf.stanford.edu sanli at snf.stanford.edu
Fri Nov 10 10:30:46 PST 2000

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My wafer is still in. I'm leaving my box there. Please put the wafer back into the box if you can recover it.

Next message: Shutdown Clear stsetch: restarted etcher & moved wafer to LoadLock.
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