Problem stsetch: very low gas (C4F8) flow
venkat at snf.stanford.edu
venkat at snf.stanford.edu
Sat Nov 11 07:22:42 PST 2000
Previous message:
Shutdown Clear stsetch: restarted etcher & moved wafer to LoadLock.
Next message:
Shutdown Clear stsetch: C4F8 cylinder changed. Ok to use.
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Previous message:
Shutdown Clear stsetch: restarted etcher & moved wafer to LoadLock.
Next message:
Shutdown Clear stsetch: C4F8 cylinder changed. Ok to use.
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch-pcs mailing list