November 2000 Archives by date

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Starting: Fri Nov 10 10:30:46 PST 2000
Ending: Thu Nov 30 08:21:11 PST 2000
Messages: 21

• Shutdown stsetch: I guess it is pump failure   sanli at snf.stanford.edu
• Shutdown Clear stsetch: restarted etcher & moved wafer to LoadLock.   booth at snf.stanford.edu
• Problem stsetch: very low gas (C4F8) flow   venkat at snf.stanford.edu
• Shutdown Clear stsetch: C4F8 cylinder changed. Ok to use.   latta at snf.stanford.edu
• Problem Clear stsetch: New cylinder. Ok to use....   latta at snf.stanford.edu
• Shutdown stsetch: Out of C4F8   latta at snf.stanford.edu
• Shutdown stsetch: turbo is down, Pierre   pindermu at snf.stanford.edu
• Shutdown stsetch: turbo stopped again!   pindermu at snf.stanford.edu
• Shutdown Clear stsetch: Restarted sys & moved wafer to LoadLock.   booth at snf.stanford.edu
• stsetch   Cesar Baxter
• Shutdown Clear stsetch: Turbo stopped again   shott at snf.stanford.edu
• Shutdown stsetch: turbo down...Pierre   pindermu at snf.stanford.edu
• Shutdown stsetch: turbo down...Pierre   cbaxter at snf.stanford.edu
• Shutdown stsetch: Turbo off symptom, needs restart   booth at snf.stanford.edu
• Shutdown stsetch: Turbo off symptom, needs restart   booth at snf.stanford.edu
• Problem stsetch:   davehong at snf.stanford.edu
• Problem stsetch:   booth at snf.stanford.edu
• Shutdown stsetch:   dtchang at snf.stanford.edu
• Problem stsetch:   dtchang at snf.stanford.edu
• Shutdown stsetch:   cbaxter at snf.stanford.edu
• Problem stsetch:   cbaxter at snf.stanford.edu

Last message date: Thu Nov 30 08:21:11 PST 2000
Archived on: Fri Jan 11 13:11:06 PST 2013

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