From linan at snf.stanford.edu Sun Oct 15 02:43:39 2000 From: linan at snf.stanford.edu (linan at snf.stanford.edu) Date: Oct 15, 2000 2:43:39 PM Subject: Problem stsetch: STS main window Message-ID: When I looked for the window with etch/passsivation time, I closed the main window of STS usually shown on the screen by mistake and was not able to open it again. I can not do my preocess. If you don't know how to go back to the main window, please waite till the problem is solved. From latta at snf.stanford.edu Mon Oct 16 10:33:14 2000 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 16, 2000 10:33:14 AM Subject: Problem Clear stsetch: Message-ID: Rebooted PC. Appears to be ok. Message sent to users.... From linan at snf.stanford.edu Mon Oct 16 04:01:13 2000 From: linan at snf.stanford.edu (linan at snf.stanford.edu) Date: Oct 16, 2000 4:01:13 PM Subject: Shutdown stsetch: STS shut down Message-ID: Wafer is broken. From booth at snf.stanford.edu Mon Oct 16 06:50:03 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 16, 2000 6:50:03 PM Subject: Shutdown Clear stsetch: Removed linan broken wafer. Message-ID: From latta at snf.stanford.edu Thu Oct 19 06:07:20 2000 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 19, 2000 6:07:20 PM Subject: Shutdown stsetch: Turbo off Message-ID: I tried the Turbo Off Recovery Procedure and at the plant off step, the turbo did not turn back on- dead.... From mcvittie at snf.stanford.edu Thu Oct 19 07:25:30 2000 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Oct 19, 2000 7:25:30 PM Subject: Shutdown Clear stsetch: Reset System, start Turbo & Remove Wafer Message-ID: From caudillo at snf.stanford.edu Thu Oct 19 10:04:55 2000 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Oct 19, 2000 10:04:55 PM Subject: Shutdown stsetch: broken wfr in chmbr Message-ID: From booth at snf.stanford.edu Fri Oct 20 07:54:51 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 20, 2000 7:54:51 AM Subject: Shutdown Clear stsetch: removed broken wafer - needs O2 clean & seasoning. Message-ID: From pruitt at snf.stanford.edu Fri Oct 20 03:53:09 2000 From: pruitt at snf.stanford.edu (pruitt at snf.stanford.edu) Date: Oct 20, 2000 3:53:09 PM Subject: Shutdown stsetch: turbo tripped off again Message-ID: From booth at snf.stanford.edu Fri Oct 20 04:43:32 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 20, 2000 4:43:32 PM Subject: Shutdown Clear stsetch: restarted turbo & software. Message-ID: From leary at snf.stanford.edu Fri Oct 20 08:51:34 2000 From: leary at snf.stanford.edu (leary at snf.stanford.edu) Date: Oct 20, 2000 8:51:34 PM Subject: Problem stsetch: etch rate very slow on DEEP <1um/min Message-ID: From booth at snf.stanford.edu Wed Oct 25 09:27:25 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 25, 2000 9:27:25 AM Subject: Problem Clear stsetch: Nancys etch rate test looks normal. Message-ID: From pindermu at snf.stanford.edu Wed Oct 25 06:58:28 2000 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Oct 25, 2000 6:58:28 PM Subject: Problem stsetch: Unable to achieve sealing with holder Message-ID: From cbaxter at snf.stanford.edu Wed Oct 25 07:46:50 2000 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 25, 2000 7:46:50 PM Subject: Problem Clear stsetch: Message-ID: From pindermu at snf.stanford.edu Wed Oct 25 08:19:25 2000 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Oct 25, 2000 8:19:25 PM Subject: Problem stsetch: Impossible to keep the helium flow within the range while using the holder Message-ID: From booth at snf.stanford.edu Thu Oct 26 11:58:30 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 26, 2000 11:58:30 AM Subject: Shutdown stsetch: need new lip seal & oil in pump. Message-ID: From booth at snf.stanford.edu Thu Oct 26 01:53:57 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 26, 2000 1:53:57 PM Subject: Shutdown Clear stsetch: installed new He lip seal & put oil in dry pump Message-ID: From booth at snf.stanford.edu Thu Oct 26 01:54:42 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 26, 2000 1:54:42 PM Subject: Problem Clear stsetch: replaced lip seal. Message-ID: From leary at snf.stanford.edu Thu Oct 26 10:15:34 2000 From: leary at snf.stanford.edu (leary at snf.stanford.edu) Date: Oct 26, 2000 10:15:34 PM Subject: Problem stsetch: load lock stuck partially pumped out Message-ID: load lock was at 37T when I came to machine. Pressing "vent" did not vent machine. Pressure did not change at all. Eventually timed out and hung up. From latta at snf.stanford.edu Fri Oct 27 09:51:49 2000 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 27, 2000 9:51:49 AM Subject: Problem Clear stsetch: Message-ID: System rebooted. From aaronp at snf.stanford.edu Sun Oct 29 06:51:36 2000 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Oct 29, 2000 6:51:36 PM Subject: Shutdown stsetch: turbo down Message-ID: From booth at snf.stanford.edu Mon Oct 30 07:41:20 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 30, 2000 7:41:20 AM Subject: Shutdown Clear stsetch: Restarted turbo & software. Message-ID: From davehong at snf.stanford.edu Tue Oct 31 07:09:11 2000 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Oct 31, 2000 7:09:11 PM Subject: Comment stsetch: sts open Message-ID: Hi, I could not finish my wafer on time for etch, so sts etcher is open from 9:30am till 1pm tomorrow, Wednesday.