Problem stsetch: etch rate very slow on DEEP <1um/min
leary at snf.stanford.edu
leary at snf.stanford.edu
Fri Oct 20 08:51:34 PDT 2000
Previous message:
Shutdown Clear stsetch: removed broken wafer - needs O2 clean & seasoning.
Next message:
Problem stsetch: Unable to achieve sealing with holder
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Previous message:
Shutdown Clear stsetch: removed broken wafer - needs O2 clean & seasoning.
Next message:
Problem stsetch: Unable to achieve sealing with holder
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch-pcs mailing list