Problem Clear stsetch: Nancys etch rate test looks normal.
booth at snf.stanford.edu
booth at snf.stanford.edu
Wed Oct 25 09:27:25 PDT 2000
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Problem stsetch: Impossible to keep the helium flow within the range while using the holder
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Shutdown Clear stsetch: installed new He lip seal & put oil in dry pump
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Previous message:
Problem stsetch: Impossible to keep the helium flow within the range while using the holder
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Shutdown Clear stsetch: installed new He lip seal & put oil in dry pump
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