Problem stsetch: Unable to achieve sealing with holder
pindermu at snf.stanford.edu
pindermu at snf.stanford.edu
Wed Oct 25 06:58:28 PDT 2000
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Problem stsetch: etch rate very slow on DEEP <1um/min
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Problem stsetch: etch rate very slow on DEEP <1um/min
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Problem stsetch: Impossible to keep the helium flow within the range while using the holder
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