Shutdown Clear stsetch: installed new He lip seal & put oil in dry pump
booth at snf.stanford.edu
booth at snf.stanford.edu
Thu Oct 26 01:53:57 PDT 2000
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Problem Clear stsetch: Nancys etch rate test looks normal.
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Problem Clear stsetch: replaced lip seal.
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Problem Clear stsetch: Nancys etch rate test looks normal.
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Problem Clear stsetch: replaced lip seal.
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