Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Apr 2 05:02:35 PDT 2001
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Problem stsetch 2001-03-31 10:50:27: still ok to use
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Shutdown stsetch 2001-04-04 00:16:35: Lock not available alarm; my wafer is still in the load lock.
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wafer piece removed..
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Problem stsetch 2001-03-31 10:50:27: still ok to use
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Shutdown stsetch 2001-04-04 00:16:35: Lock not available alarm; my wafer is still in the load lock.
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