Shutdown stsetch 2001-04-04 00:16:35: Lock not available alarm; my wafer is still in the load lock.
pindermu at snf.stanford.edu
pindermu at snf.stanford.edu
Wed Apr 4 12:16:36 PDT 2001
Previous message:
Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok
Next message:
Shutdown stsetch 2001-04-04 00:16:35: Lock not available alarm; my wafer is still in the load lock.
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Previous message:
Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok
Next message:
Shutdown stsetch 2001-04-04 00:16:35: Lock not available alarm; my wafer is still in the load lock.
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch-pcs mailing list