Shutdown stsetch 2001-04-13 13:46:12: wafer broke in etch chamber
latta at snf.stanford.edu
latta at snf.stanford.edu
Fri Apr 13 03:54:46 PDT 2001
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Shutdown stsetch 2001-04-13 13:46:12: wafer broke in etch chamber
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Problem stsetch 2001-04-14 18:06:03: found system locked in pumpdown
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Back up- O2 CLEAN run.
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Shutdown stsetch 2001-04-13 13:46:12: wafer broke in etch chamber
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Problem stsetch 2001-04-14 18:06:03: found system locked in pumpdown
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