April 2001 Archives by author

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Starting: Mon Apr 2 05:02:18 PDT 2001
Ending: Wed Apr 25 08:06:45 PDT 2001
Messages: 14

• Shutdown stsetch 2001-04-04 00:16:35: Lock not available alarm; my wafer is still in the load lock.   booth at snf.stanford.edu
• Problem stsetch 2001-04-14 18:06:03: found system locked in pumpdown   booth at snf.stanford.edu
• Problem stsetch 2001-04-21 11:38:20: Poor gas flow   booth at snf.stanford.edu
• Problem stsetch 2001-03-31 10:50:27: still ok to use   cbaxter at snf.stanford.edu
• Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok   cbaxter at snf.stanford.edu
• Shutdown stsetch 2001-04-25 18:06:34:   cbaxter at snf.stanford.edu
• Shutdown stsetch 2001-04-25 18:06:34:   cbaxter at snf.stanford.edu
• Shutdown stsetch 2001-04-25 18:06:34:   cbaxter at snf.stanford.edu
• Problem stsetch 2001-04-21 11:38:20: Poor gas flow   dlaser at snf.stanford.edu
• Shutdown stsetch 2001-04-13 13:46:12: wafer broke in etch chamber   dtchang at snf.stanford.edu
• Shutdown stsetch 2001-04-25 18:06:34:   dton at snf.stanford.edu
• Shutdown stsetch 2001-04-13 13:46:12: wafer broke in etch chamber   latta at snf.stanford.edu
• Shutdown stsetch 2001-04-04 00:16:35: Lock not available alarm; my wafer is still in the load lock.   pindermu at snf.stanford.edu
• Problem stsetch 2001-04-14 18:06:03: found system locked in pumpdown   sjlee at snf.stanford.edu

Last message date: Wed Apr 25 08:06:45 PDT 2001
Archived on: Fri Jan 11 13:11:06 PST 2013

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