Shutdown stsetch 2001-08-09 16:40:11: Lock Pumpdown Failure

mbartsch at snf.stanford.edu mbartsch at snf.stanford.edu
Thu Aug 9 04:40:12 PDT 2001


A wafer is in the chamber and cannot be unloaded.  The machine view indicates the lock chamber is open...but it is not.  The pressure reading in the lock chamber is around 2200mT and increases a little each time an unload is attempted (and aborted...).  The valves depicted at the bottom of the lock chamber appear to be stuck in the "closed" position and do not toggle open and shut as usual.  Both Nancy and Aaron P tried to unload the wafer with no success...




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