Shutdown stsetch 2001-08-10 09:32:16: Broken wafer inside the chamber
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Aug 10 11:05:23 PDT 2001
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Shutdown stsetch 2001-08-10 09:32:16: Broken wafer inside the chamber
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Shutdown stsetch 2001-08-10 10:35:33: broken wafer.
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Shutdown stsetch 2001-08-10 09:32:16: Broken wafer inside the chamber
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