Shutdown stsetch 2001-08-25 07:49:05: facility
rcrane at snf.stanford.edu
rcrane at snf.stanford.edu
Sat Aug 25 04:30:00 PDT 2001
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Shutdown stsetch 2001-08-25 07:49:05: facility
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Problem stsetch 2001-08-27 09:18:30: 3 small pieces left in chamber outside of wafer area
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exhaust is up
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Shutdown stsetch 2001-08-25 07:49:05: facility
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Problem stsetch 2001-08-27 09:18:30: 3 small pieces left in chamber outside of wafer area
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