Problem stsetch 2001-08-27 09:18:30: 3 small pieces left in chamber outside of wafer area

yangxu at yangxu at
Mon Aug 27 09:18:32 PDT 2001

three pieaces of 1mm by 1mm silicon were removed by from the wafer surface by gas flow and landed outside of the wafer area. Sorry for the trouble. We will change our process to make sure it won't happen again. 

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