Shutdown stsetch 2001-08-27 12:03:29: Broken pieces in chamber.
latta at snf.stanford.edu
latta at snf.stanford.edu
Mon Aug 27 12:03:30 PDT 2001
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Problem stsetch 2001-08-27 09:18:30: 3 small pieces left in chamber outside of wafer area
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Shutdown stsetch 2001-08-27 12:03:29: Broken pieces in chamber.
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Problem stsetch 2001-08-27 09:18:30: 3 small pieces left in chamber outside of wafer area
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Shutdown stsetch 2001-08-27 12:03:29: Broken pieces in chamber.
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