From jdas at snf.stanford.edu Tue Dec 4 07:23:08 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Dec 4, 2001 7:23:08 AM Subject: Problem stsetch 2001-12-04 07:23:07: Ooad lock pump down problem Message-ID: Load lock would not pump down after wafer loaded. From booth at snf.stanford.edu Tue Dec 4 07:36:14 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 4, 2001 7:36:14 AM Subject: Problem stsetch 2001-12-04 07:23:07: Ooad lock pump down problem Message-ID: LoadLock controller went nuts again. Reset it, & restarted system software. It's working normally again. From bgray at snf.stanford.edu Wed Dec 5 11:22:19 2001 From: bgray at snf.stanford.edu (bgray at snf.stanford.edu) Date: Dec 5, 2001 11:22:19 AM Subject: Problem stsetch 2001-12-05 11:22:18: STS turbo tripped due to inter lock failure Message-ID: Turbo tripped during process with wafer inside From bgray at snf.stanford.edu Wed Dec 5 11:24:25 2001 From: bgray at snf.stanford.edu (bgray at snf.stanford.edu) Date: Dec 5, 2001 11:24:25 AM Subject: Shutdown stsetch 2001-12-05 11:24:23: tool tripped druing process turing turbo off Message-ID: From bgray at snf.stanford.edu Wed Dec 5 11:25:21 2001 From: bgray at snf.stanford.edu (bgray at snf.stanford.edu) Date: Dec 5, 2001 11:25:21 AM Subject: Shutdown stsetch 2001-12-05 11:25:20: lock excessive pump down time error Message-ID: From booth at snf.stanford.edu Wed Dec 5 11:32:00 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 5, 2001 11:32:00 AM Subject: Shutdown stsetch 2001-12-05 11:25:20: lock excessive pump down time error Message-ID: restarted system software. From booth at snf.stanford.edu Wed Dec 5 11:32:04 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 5, 2001 11:32:04 AM Subject: Shutdown stsetch 2001-12-05 11:24:23: tool tripped druing process turing turbo off Message-ID: From booth at snf.stanford.edu Wed Dec 5 11:32:09 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 5, 2001 11:32:09 AM Subject: Problem stsetch 2001-12-05 11:22:18: STS turbo tripped due to inter lock failure Message-ID: From mnepo at snf.stanford.edu Thu Dec 6 09:44:35 2001 From: mnepo at snf.stanford.edu (mnepo at snf.stanford.edu) Date: Dec 6, 2001 9:44:35 AM Subject: Shutdown stsetch 2001-12-06 09:44:35: software crash Message-ID: From booth at snf.stanford.edu Thu Dec 6 09:48:18 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 6, 2001 9:48:18 AM Subject: Shutdown stsetch 2001-12-06 09:44:35: software crash Message-ID: wafer in process chamber - OK restarted system software. From jdas at snf.stanford.edu Tue Dec 11 08:42:00 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Dec 11, 2001 8:42:00 PM Subject: Problem stsetch 2001-12-11 20:42:00: ICP deep process failed due to over pressure Message-ID: Tool has user 'wliu' s wafer inside the process chamber From cbaxter at snf.stanford.edu Tue Dec 11 09:25:08 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 11, 2001 9:25:08 PM Subject: Problem stsetch 2001-12-11 20:42:00: ICP deep process failed due to over pressure Message-ID: unload wafer and reset tool. From kjliu at snf.stanford.edu Wed Dec 12 05:53:19 2001 From: kjliu at snf.stanford.edu (kjliu at snf.stanford.edu) Date: Dec 12, 2001 5:53:19 AM Subject: Problem stsetch 2001-12-12 05:53:18: over pressure warning Message-ID: over pressure warning during etching From latta at snf.stanford.edu Wed Dec 12 10:53:41 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 12, 2001 10:53:41 AM Subject: Problem stsetch 2001-12-12 10:53:40: Chanber pressure high! Message-ID: I just took a look at the log sheets (since I haven't been running the tool much) and over the last week the chamber pressure for the DEEP program has gone up to 50-54mT. It is usually in the 38-40 range. Perhaps the turbo needs a clean- it's been about 2 yrs.... From latta at snf.stanford.edu Wed Dec 12 01:03:58 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 12, 2001 1:03:58 PM Subject: Shutdown stsetch 2001-12-12 13:03:57: No RF power. Message-ID: From cbaxter at snf.stanford.edu Wed Dec 12 06:22:47 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 12, 2001 6:22:47 PM Subject: Shutdown stsetch 2001-12-12 13:03:57: No RF power. Message-ID: From cbaxter at snf.stanford.edu Wed Dec 12 06:23:13 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 12, 2001 6:23:13 PM Subject: Problem stsetch 2001-12-12 10:53:40: Chanber pressure high! Message-ID: change top lid oring From cbaxter at snf.stanford.edu Wed Dec 12 06:23:45 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 12, 2001 6:23:45 PM Subject: Problem stsetch 2001-12-12 05:53:18: over pressure warning Message-ID: ran o2 and pressure is stable setpoint is 30m/t From jdas at snf.stanford.edu Thu Dec 13 01:26:09 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Dec 13, 2001 1:26:09 AM Subject: Problem stsetch 2001-12-13 01:26:08: WINDOWS CONTROLLER Message-ID: After wafer load, application error message appeared. Wafer is in system and would like to retrieve it. From latta at snf.stanford.edu Thu Dec 13 10:36:51 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 13, 2001 10:36:51 AM Subject: Problem stsetch 2001-12-13 01:26:08: WINDOWS CONTROLLER Message-ID: Re-booted PC. Ok. From latta at snf.stanford.edu Thu Dec 13 10:37:59 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 13, 2001 10:37:59 AM Subject: Problem stsetch 2001-12-13 10:37:34: Chamber pressure still high DEEP= 50mT Message-ID: From cbaxter at snf.stanford.edu Thu Dec 13 06:26:04 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 13, 2001 6:26:04 PM Subject: Problem stsetch 2001-12-13 10:37:34: Chamber pressure still high DEEP= 50mT Message-ID: pressure is lower now deep is at 35 to 42 m/t From jdas at snf.stanford.edu Fri Dec 14 11:53:17 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Dec 14, 2001 11:53:17 AM Subject: Problem stsetch 2001-12-14 11:53:16: Process failed due to over pressure Message-ID: From latta at snf.stanford.edu Fri Dec 14 01:40:00 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 14, 2001 1:40:00 PM Subject: Shutdown stsetch 2001-12-14 13:39:58: No power to turbo controller Message-ID: Did not recover after turbo tripped off. Also, I was watching the turbo right before it turned off; read 394hz. From latta at snf.stanford.edu Fri Dec 14 01:52:23 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 14, 2001 1:52:23 PM Subject: Shutdown stsetch 2001-12-14 13:39:58: No power to turbo controller Message-ID: Henry started it.... From latta at snf.stanford.edu Fri Dec 14 01:52:38 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 14, 2001 1:52:38 PM Subject: Problem stsetch 2001-12-14 11:53:16: Process failed due to over pressure Message-ID: Yep. From latta at snf.stanford.edu Fri Dec 14 01:53:48 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 14, 2001 1:53:48 PM Subject: Problem stsetch 2001-12-14 13:53:46: Chamber pressure high. Message-ID: From cbaxter at snf.stanford.edu Fri Dec 14 07:50:56 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 14, 2001 7:50:56 PM Subject: Problem stsetch 2001-12-14 13:53:46: Chamber pressure high. Message-ID: deep etch recipe first step pressure is @19m/t and second step is 36m/t From pindermu at snf.stanford.edu Mon Dec 17 07:27:33 2001 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Dec 17, 2001 7:27:33 PM Subject: Problem stsetch 2001-12-17 19:27:32: plasma unstable during passivation step Message-ID: I don't want to run an O2 clean with a new lip seal, but it might help... Pierre From cbaxter at snf.stanford.edu Mon Dec 17 07:47:15 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 17, 2001 7:47:15 PM Subject: Problem stsetch 2001-12-17 19:27:32: plasma unstable during passivation step Message-ID: tested with o2 clean plasma. rf is turning fine From pindermu at snf.stanford.edu Mon Dec 17 11:34:37 2001 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Dec 17, 2001 11:34:37 PM Subject: Shutdown stsetch 2001-12-17 23:34:34: Loadlock not available alarm Message-ID: From booth at snf.stanford.edu Tue Dec 18 07:09:34 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 18, 2001 7:09:34 AM Subject: Shutdown stsetch 2001-12-17 23:34:34: Loadlock not available alarm Message-ID: restarted system software, removed two wafers from LoadLock. From yangxu at snf.stanford.edu Wed Dec 19 06:08:55 2001 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Dec 19, 2001 6:08:55 PM Subject: Shutdown stsetch 2001-12-19 18:08:54: one pieace broke off wafer Message-ID: when etching through a wafer carrioed on 550um thick carrier wafer, one pieace (1cm by 1.5cm in size) was broken inside the chamber. It was left out side the circular etching area. From cbaxter at snf.stanford.edu Wed Dec 19 06:44:06 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 19, 2001 6:44:06 PM Subject: Shutdown stsetch 2001-12-19 18:08:54: one pieace broke off wafer Message-ID: vented chamber and removed wafer