December 2001 Archives by thread

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Starting: Tue Dec 4 07:23:08 PST 2001
Ending: Wed Dec 19 06:44:06 PST 2001
Messages: 34

• Problem stsetch 2001-12-04 07:23:07: Ooad lock pump down problem   jdas at snf.stanford.edu
  • Problem stsetch 2001-12-04 07:23:07: Ooad lock pump down problem   booth at snf.stanford.edu
• Problem stsetch 2001-12-05 11:22:18: STS turbo tripped due to inter lock failure   bgray at snf.stanford.edu
  • Problem stsetch 2001-12-05 11:22:18: STS turbo tripped due to inter lock failure   booth at snf.stanford.edu
• Shutdown stsetch 2001-12-05 11:24:23: tool tripped druing process turing turbo off   bgray at snf.stanford.edu
  • Shutdown stsetch 2001-12-05 11:24:23: tool tripped druing process turing turbo off   booth at snf.stanford.edu
• Shutdown stsetch 2001-12-05 11:25:20: lock excessive pump down time error   bgray at snf.stanford.edu
  • Shutdown stsetch 2001-12-05 11:25:20: lock excessive pump down time error   booth at snf.stanford.edu
• Shutdown stsetch 2001-12-06 09:44:35: software crash   mnepo at snf.stanford.edu
  • Shutdown stsetch 2001-12-06 09:44:35: software crash   booth at snf.stanford.edu
• Problem stsetch 2001-12-11 20:42:00: ICP deep process failed due to over pressure   jdas at snf.stanford.edu
  • Problem stsetch 2001-12-11 20:42:00: ICP deep process failed due to over pressure   cbaxter at snf.stanford.edu
• Shutdown stsetch 2001-12-12 13:03:57: No RF power.   latta at snf.stanford.edu
  • Shutdown stsetch 2001-12-12 13:03:57: No RF power.   cbaxter at snf.stanford.edu
• Problem stsetch 2001-12-12 05:53:18: over pressure warning   kjliu at snf.stanford.edu
  • Problem stsetch 2001-12-12 05:53:18: over pressure warning   cbaxter at snf.stanford.edu
• Problem stsetch 2001-12-12 10:53:40: Chanber pressure high!   latta at snf.stanford.edu
  • Problem stsetch 2001-12-12 10:53:40: Chanber pressure high!   cbaxter at snf.stanford.edu
• Problem stsetch 2001-12-13 01:26:08: WINDOWS CONTROLLER   jdas at snf.stanford.edu
  • Problem stsetch 2001-12-13 01:26:08: WINDOWS CONTROLLER   latta at snf.stanford.edu
• Problem stsetch 2001-12-13 10:37:34: Chamber pressure still high DEEP= 50mT   latta at snf.stanford.edu
  • Problem stsetch 2001-12-13 10:37:34: Chamber pressure still high DEEP= 50mT   cbaxter at snf.stanford.edu
• Shutdown stsetch 2001-12-14 13:39:58: No power to turbo controller   latta at snf.stanford.edu
  • Shutdown stsetch 2001-12-14 13:39:58: No power to turbo controller   latta at snf.stanford.edu
• Problem stsetch 2001-12-14 13:53:46: Chamber pressure high.   latta at snf.stanford.edu
  • Problem stsetch 2001-12-14 13:53:46: Chamber pressure high.   cbaxter at snf.stanford.edu
• Problem stsetch 2001-12-14 11:53:16: Process failed due to over pressure   jdas at snf.stanford.edu
  • Problem stsetch 2001-12-14 11:53:16: Process failed due to over pressure   latta at snf.stanford.edu
• Problem stsetch 2001-12-17 19:27:32: plasma unstable during passivation step   pindermu at snf.stanford.edu
  • Problem stsetch 2001-12-17 19:27:32: plasma unstable during passivation step   cbaxter at snf.stanford.edu
• Shutdown stsetch 2001-12-17 23:34:34: Loadlock not available alarm   pindermu at snf.stanford.edu
  • Shutdown stsetch 2001-12-17 23:34:34: Loadlock not available alarm   booth at snf.stanford.edu
• Shutdown stsetch 2001-12-19 18:08:54: one pieace broke off wafer   yangxu at snf.stanford.edu
  • Shutdown stsetch 2001-12-19 18:08:54: one pieace broke off wafer   cbaxter at snf.stanford.edu

Last message date: Wed Dec 19 06:44:06 PST 2001
Archived on: Fri Jan 11 13:11:08 PST 2013

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