From caudillo at snf.stanford.edu Thu Feb 1 02:07:33 2001 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Feb 1, 2001 2:07:33 PM Subject: Shutdown stsetch 2001-02-01 14:07:32: turbo tripped last 30sec of etch rcp Message-ID: From latta at snf.stanford.edu Thu Feb 1 02:47:06 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 1, 2001 2:47:06 PM Subject: Shutdown stsetch 2001-02-01 14:07:32: turbo tripped last 30sec of etch rcp Message-ID: Turbo re-started. From dtchang at snf.stanford.edu Fri Feb 9 01:20:43 2001 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Feb 9, 2001 1:20:43 AM Subject: Shutdown stsetch 2001-02-09 01:20:43: Message-ID: Alarm lock not available From dtchang at snf.stanford.edu Fri Feb 9 01:20:58 2001 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Feb 9, 2001 1:20:58 AM Subject: Problem stsetch 2001-02-09 01:20:57: Message-ID: alarm lock not available From booth at snf.stanford.edu Fri Feb 9 07:37:55 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 9, 2001 7:37:55 AM Subject: Problem stsetch 2001-02-09 01:20:57: Message-ID: redundant msg. From booth at snf.stanford.edu Fri Feb 9 07:45:17 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 9, 2001 7:45:17 AM Subject: Shutdown stsetch 2001-02-09 01:20:43: Message-ID: restarted system software, and removed wafer. From venkat at snf.stanford.edu Wed Feb 28 01:18:26 2001 From: venkat at snf.stanford.edu (venkat at snf.stanford.edu) Date: Feb 28, 2001 1:18:26 AM Subject: Problem stsetch 2001-02-28 01:18:23: door will not open Message-ID: From cbaxter at snf.stanford.edu Wed Feb 28 05:15:34 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 28, 2001 5:15:34 PM Subject: Problem stsetch 2001-02-28 01:18:23: door will not open Message-ID: software will not communicate. power down system and reseated handler cable. was able to int. system.