From latta at snf.stanford.edu Tue Jan 2 05:35:36 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 2, 2001 5:35:36 PM Subject: Shutdown stsetch 2000-12-18 20:33:31: rf won't turn on ...... Message-ID: Chuiller fixed; RF fine. Ran O2 clean 30 mins. From booth at snf.stanford.edu Wed Jan 3 08:55:11 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 3, 2001 8:55:11 AM Subject: Shutdown stsetch 2001-01-03 08:55:07: Message-ID: Chiller needs repair. From latta at snf.stanford.edu Wed Jan 3 11:16:34 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 3, 2001 11:16:34 AM Subject: Shutdown stsetch 2001-01-03 08:55:07: Message-ID: Cleared to test From latta at snf.stanford.edu Wed Jan 3 11:20:01 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 3, 2001 11:20:01 AM Subject: Shutdown stsetch 2001-01-03 11:19:59: Still on shutdown Message-ID: From latta at snf.stanford.edu Wed Jan 3 02:38:02 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 3, 2001 2:38:02 PM Subject: Comment stsetch 2001-01-03 14:38:01: Can't est communications.... Message-ID: From booth at snf.stanford.edu Wed Jan 3 02:52:01 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 3, 2001 2:52:01 PM Subject: Shutdown stsetch 2001-01-03 11:19:59: Still on shutdown Message-ID: Interlock working again. From pindermu at snf.stanford.edu Thu Jan 4 07:34:46 2001 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Jan 4, 2001 7:34:46 PM Subject: Problem stsetch 2001-01-04 19:34:23: Plate power sometimes went out of tolerance (SMOODEEP prog.) Message-ID: From cbaxter at snf.stanford.edu Thu Jan 4 10:38:33 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 4, 2001 10:38:33 PM Subject: Problem stsetch 2001-01-04 19:34:23: Plate power sometimes went out of tolerance (SMOODEEP prog.) Message-ID: hard reset system and retried again running process. now both rf is on when enable. From dtchang at snf.stanford.edu Thu Jan 4 11:52:27 2001 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Jan 4, 2001 11:52:27 PM Subject: Problem stsetch 2001-01-04 23:52:25: Turbo Shut Off During Run Again... Message-ID: The turbo pump spun down during my process again. From dtchang at snf.stanford.edu Fri Jan 5 12:07:32 2001 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Jan 5, 2001 12:07:32 AM Subject: Shutdown stsetch 2001-01-05 00:07:31: turbo shut down again. Message-ID: turbo pump shut down in the middle of my run... again. From booth at snf.stanford.edu Fri Jan 5 07:58:29 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 5, 2001 7:58:29 AM Subject: Shutdown stsetch 2001-01-05 00:07:31: turbo shut down again. Message-ID: restarted tool & removed wafer fromsystem. From booth at snf.stanford.edu Fri Jan 5 07:58:34 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 5, 2001 7:58:34 AM Subject: Problem stsetch 2001-01-04 23:52:25: Turbo Shut Off During Run Again... Message-ID: From booth at snf.stanford.edu Mon Jan 8 06:57:23 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 8, 2001 6:57:23 AM Subject: Shutdown stsetch 2001-01-08 06:57:22: Message-ID: broken wafer in etch chamber. From latta at snf.stanford.edu Tue Jan 9 04:51:38 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 9, 2001 4:51:38 PM Subject: Shutdown stsetch 2001-01-08 06:57:22: Working again... don't know why! Message-ID: From pindermu at snf.stanford.edu Tue Jan 9 07:16:11 2001 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Jan 9, 2001 7:16:11 PM Subject: Problem stsetch 2001-01-09 19:16:10: Started to pump down the load chamber while the lid was open; I closed the lid as quick as possible (to prevent any damage to the pumps). Cesar had to restart it (there was no way to vent). Message-ID: From cbaxter at snf.stanford.edu Tue Jan 9 08:10:05 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 9, 2001 8:10:05 PM Subject: Problem stsetch 2001-01-09 19:16:10: Started to pump down the load chamber while the lid was open; I closed the lid as quick as possible (to prevent any damage to the pumps). Cesar had to restart it (there was no way to vent). Message-ID: system also error for compress air fault..reset system.. From latta at snf.stanford.edu Thu Jan 11 05:36:31 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 11, 2001 5:36:31 PM Subject: Shutdown stsetch 2001-01-11 17:36:31: Interlock failure error again.... Message-ID: I re-started tubo, interlock failure error appeared. Did two re-boots- no help. From cbaxter at snf.stanford.edu Thu Jan 11 08:51:32 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 11, 2001 8:51:32 PM Subject: Shutdown stsetch 2001-01-11 17:36:31: Interlock failure error again.... Message-ID: cleared interlock failure From dtchang at snf.stanford.edu Mon Jan 15 08:06:26 2001 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Jan 15, 2001 8:06:26 PM Subject: Problem stsetch 2001-01-15 20:06:25: Wafer stuck in Load Lock during Loading Message-ID: Wafer stuck in load lock when I loaded it. Error was something like "Exessive pump time exceeded." From dtchang at snf.stanford.edu Mon Jan 15 08:08:54 2001 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Jan 15, 2001 8:08:54 PM Subject: Shutdown stsetch 2001-01-15 20:08:53: Wafer Stuck in Load Lock Message-ID: Wafer stuck in load lock when i tried to load my wafer in. Error listed was something like "Excessive pump time" or "Load pump time exceeded..." From booth at snf.stanford.edu Tue Jan 16 06:41:51 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 16, 2001 6:41:51 AM Subject: Shutdown stsetch 2001-01-15 20:08:53: Wafer Stuck in Load Lock Message-ID: restarted system & removed wafer from LoadLock. From booth at snf.stanford.edu Tue Jan 16 06:41:56 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 16, 2001 6:41:56 AM Subject: Problem stsetch 2001-01-15 20:06:25: Wafer stuck in Load Lock during Loading Message-ID: From tombler at snf.stanford.edu Sun Jan 21 06:01:35 2001 From: tombler at snf.stanford.edu (tombler at snf.stanford.edu) Date: Jan 21, 2001 6:01:35 PM Subject: Problem stsetch 2001-01-21 18:01:35: "compressed air fault" alarm Message-ID: From booth at snf.stanford.edu Mon Jan 22 08:59:20 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 22, 2001 8:59:20 AM Subject: Problem stsetch 2001-01-21 18:01:35: "compressed air fault" alarm Message-ID: restarted system. From sigari at snf.stanford.edu Tue Jan 23 10:44:26 2001 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Jan 23, 2001 10:44:26 AM Subject: Shutdown stsetch 2001-01-23 10:40:42: Message-ID: pump down failure From booth at snf.stanford.edu Tue Jan 23 11:12:54 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 23, 2001 11:12:54 AM Subject: Shutdown stsetch 2001-01-23 10:40:42: Message-ID: STS user forgot to press EMIS button on the ion guage controller.