Shutdown stsetch 2001-01-11 17:36:31: Interlock failure error again....
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Jan 11 08:51:32 PST 2001
Previous message:
Shutdown stsetch 2001-01-11 17:36:31: Interlock failure error again....
Next message:
Problem stsetch 2001-01-15 20:06:25: Wafer stuck in Load Lock during Loading
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
cleared interlock failure
Previous message:
Shutdown stsetch 2001-01-11 17:36:31: Interlock failure error again....
Next message:
Problem stsetch 2001-01-15 20:06:25: Wafer stuck in Load Lock during Loading
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch-pcs mailing list