Problem stsetch 2001-01-15 20:06:25: Wafer stuck in Load Lock during Loading

dtchang at snf.stanford.edu dtchang at snf.stanford.edu
Mon Jan 15 08:06:26 PST 2001


Wafer stuck in load lock when I loaded it.  Error was something like "Exessive pump time exceeded."




More information about the stsetch-pcs mailing list