Shutdown stsetch 2001-01-15 20:08:53: Wafer Stuck in Load Lock

dtchang at snf.stanford.edu dtchang at snf.stanford.edu
Mon Jan 15 08:08:54 PST 2001


Wafer stuck in load lock when i tried to load my wafer in.  Error listed was something like "Excessive pump time" or "Load pump time exceeded..."




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