From mbartsch at snf.stanford.edu Sat Jul 14 11:13:26 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Jul 14, 2001 11:13:26 AM Subject: Problem stsetch 2001-07-14 11:13:24: Comm Lost - Wafer Inside Message-ID: Control screen says "trying to re-establish communication links". Frank Shi's wafer is stuck in the chamber as of 11:30pm, 7/13/2001. From ericp at snf.stanford.edu Sat Jul 14 03:13:04 2001 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Jul 14, 2001 3:13:04 PM Subject: Problem stsetch 2001-07-14 15:13:02: Comm restored- system ok Message-ID: I pressed "ok" to clear the error box, and then re-opened the operator station. Communication restored with no problems. Pressed "unload", wafer came out like normal. One curious observation: When the comm was down, the screen read "waiting for transfer" or something similar. Perhaps the act of disabling and enabling "fixes" the comm error (?) From mbartsch at snf.stanford.edu Sun Jul 15 04:58:51 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Jul 15, 2001 4:58:51 AM Subject: Problem stsetch 2001-07-15 04:58:49: Hazy scum on wafers Message-ID: Running the SMOODEEP program on relatively short etches (<20um), I've been getting some sort of non-uniform residue deposited on my wafers. I did not have this problem running the same program a week ago, so it must be a new development. The scum seems to be completely resistant to oxygen plasma...I haven't checked yet to see if anything else will remove it...of course I also don't know what may now be contaminating my wafers... I ran a 30min O2 clean of the STS chamber, but the next wafer I ran still came out with scum on it. From holdenli at snf.stanford.edu Sun Jul 15 07:58:23 2001 From: holdenli at snf.stanford.edu (holdenli at snf.stanford.edu) Date: Jul 15, 2001 7:58:23 AM Subject: Problem stsetch 2001-07-15 07:58:22: STS Etcher is locked Message-ID: The etcher was stopped during process by the system. Error message is "Lock not available alarm". Wafer is still in the chamber. Unable to retrieve wafer from the etcher. Unable to rectify the problem. From lmiller at snf.stanford.edu Sun Jul 15 04:13:26 2001 From: lmiller at snf.stanford.edu (lmiller at snf.stanford.edu) Date: Jul 15, 2001 4:13:26 PM Subject: Comment stsetch 2001-07-15 16:13:26: STS fixed by A. Partridge Message-ID: From lmiller at snf.stanford.edu Sun Jul 15 04:14:24 2001 From: lmiller at snf.stanford.edu (lmiller at snf.stanford.edu) Date: Jul 15, 2001 4:14:24 PM Subject: Problem stsetch 2001-07-15 16:14:22: STS fixed by A. Partridge Message-ID: From ericp at snf.stanford.edu Sun Jul 15 06:31:56 2001 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Jul 15, 2001 6:31:56 PM Subject: Problem stsetch 2001-07-15 18:31:54: STS field serv. came! Message-ID: What luck! STS field service showed up by surprise on Sunday. (Say Wha?!) They changed the ECU for a newer version. I spoke to him about the weird problem(s) over the weekend, and he said that it might possibly be a dying battery in the system. He will put that on the service manager's desk tomorrow morning (I don't know exactly what that means, but they are aware of it). -Eric From booth at snf.stanford.edu Mon Jul 16 07:12:55 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 16, 2001 7:12:55 AM Subject: Problem stsetch 2001-07-15 18:31:54: STS field serv. came! Message-ID: From booth at snf.stanford.edu Mon Jul 16 07:12:59 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 16, 2001 7:12:59 AM Subject: Problem stsetch 2001-07-15 16:14:22: STS fixed by A. Partridge Message-ID: From booth at snf.stanford.edu Mon Jul 16 07:13:05 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 16, 2001 7:13:05 AM Subject: Problem stsetch 2001-07-15 07:58:22: STS Etcher is locked Message-ID: From booth at snf.stanford.edu Mon Jul 16 07:13:11 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 16, 2001 7:13:11 AM Subject: Problem stsetch 2001-07-14 15:13:02: Comm restored- system ok Message-ID: From booth at snf.stanford.edu Mon Jul 16 07:13:15 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 16, 2001 7:13:15 AM Subject: Problem stsetch 2001-07-14 11:13:24: Comm Lost - Wafer Inside Message-ID: From booth at snf.stanford.edu Mon Jul 16 09:45:34 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 16, 2001 9:45:34 AM Subject: Problem stsetch 2001-07-15 04:58:49: Hazy scum on wafers Message-ID: Nancy verified that this is a process/recipe issue, not a machine fault. From latta at snf.stanford.edu Tue Jul 17 04:20:46 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 17, 2001 4:20:46 PM Subject: Problem stsetch 2001-07-17 16:20:44: PC locks up! Message-ID: Either the communications error or the new clamp timeout error is displayed. PC requires frequent reboots to run. Very frustrating. Perhaps the battery needs changing? From cbaxter at snf.stanford.edu Tue Jul 17 04:35:52 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 17, 2001 4:35:52 PM Subject: Problem stsetch 2001-07-17 16:20:44: PC locks up! Message-ID: reboot pc.. From wliu at snf.stanford.edu Wed Jul 18 11:03:47 2001 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Jul 18, 2001 11:03:47 AM Subject: Problem stsetch 2001-07-18 11:03:45: he flow fluctuates a lot Message-ID: he flow fluctuates wildly between 2.8-4.1 while using holder even after cleaning back of holder w/ acetone. Has gotten progreesively worse over past couple of weeks. From wliu at snf.stanford.edu Wed Jul 18 11:04:48 2001 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Jul 18, 2001 11:04:48 AM Subject: Problem stsetch 2001-07-18 11:04:47: error while loading wafer Message-ID: there is an error while loading the wafer. Something to do with loading pumpdown or lock time exceeded. Have to unload and reload to continue. From cbaxter at snf.stanford.edu Wed Jul 18 06:24:28 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 18, 2001 6:24:28 PM Subject: Problem stsetch 2001-07-18 11:04:47: error while loading wafer Message-ID: reboot system From cbaxter at snf.stanford.edu Wed Jul 18 06:24:45 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 18, 2001 6:24:45 PM Subject: Problem stsetch 2001-07-18 11:03:45: he flow fluctuates a lot Message-ID: he is stable From pindermu at snf.stanford.edu Wed Jul 18 11:13:52 2001 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Jul 18, 2001 11:13:52 PM Subject: Problem stsetch 2001-07-18 23:13:50: Wafer loading Message-ID: The clamping of the wafer on the bottom electrode is not always achieved properly when loading. This freezes the commands. From cbaxter at snf.stanford.edu Thu Jul 19 07:20:06 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 19, 2001 7:20:06 PM Subject: Problem stsetch 2001-07-18 23:13:50: Wafer loading Message-ID: power down system and reboot pc From ericp at snf.stanford.edu Sat Jul 21 04:51:30 2001 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Jul 21, 2001 4:51:30 PM Subject: Problem stsetch 2001-07-21 16:51:29: backside cooling seems poor Message-ID: I processed 5 wafers last week through the exact same litho process, and etched 3 of them last week with no problem. This week, I attempted to etch the other two, and the resist burned off very early. Also, I noticed the He FLOW was a little unstable, though hovering around 2.7-3.0. Would a bad lip seal cause this problem? -Eric From yangxu at snf.stanford.edu Mon Jul 23 10:53:31 2001 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Jul 23, 2001 10:53:31 AM Subject: Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine Message-ID: 1/5 of 4 inch wafer was broken of by clamps and was left inside the machine which can be seen visually on the center plate. From latta at snf.stanford.edu Mon Jul 23 04:14:52 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 23, 2001 4:14:52 PM Subject: Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine Message-ID: Wafer removed, lid and lip seals replaced, oil added to blower. O2clean recipe run. Deep recipe run. He pressure and flow fine. Gas flows fine. Chamber pressure on the low side, but within spec. No resist burning observed. From latta at snf.stanford.edu Mon Jul 23 04:15:41 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 23, 2001 4:15:41 PM Subject: Problem stsetch 2001-07-21 16:51:29: backside cooling seems poor Message-ID: Lip seal replaced. He pressure and flow ok. No resist burning after 40 mins of DEEP recipe. From latta at snf.stanford.edu Tue Jul 24 03:24:34 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 24, 2001 3:24:34 PM Subject: Shutdown stsetch 2001-07-24 15:24:33: Wafer fell off chuck during unload. Message-ID: From latta at snf.stanford.edu Tue Jul 24 04:58:30 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 24, 2001 4:58:30 PM Subject: Shutdown stsetch 2001-07-24 15:24:33: Wafer fell off chuck during unload. Message-ID: Wafer recovered, O2 clean run. From latta at snf.stanford.edu Wed Jul 25 12:28:23 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 25, 2001 12:28:23 PM Subject: Shutdown stsetch 2001-07-25 12:28:22: Wafer pieces need to be removed.... Message-ID: From latta at snf.stanford.edu Wed Jul 25 03:44:07 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 25, 2001 3:44:07 PM Subject: Shutdown stsetch 2001-07-25 12:28:22: Wafer pieces need to be removed.... Message-ID: O2 clean and seasoning.... From lian at snf.stanford.edu Sat Jul 28 12:25:17 2001 From: lian at snf.stanford.edu (lian at snf.stanford.edu) Date: Jul 28, 2001 12:25:17 AM Subject: Shutdown stsetch 2001-07-28 00:25:15: Message-ID: broken pieces in chamber From latta at snf.stanford.edu Mon Jul 30 12:27:32 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 30, 2001 12:27:32 PM Subject: Shutdown stsetch 2001-07-28 00:25:15: Message-ID: Wafer bits removed, chamber vacuumed, user contacted, O2CLEAN run, DEEP run.