Problem stsetch 2001-07-15 07:58:22: STS Etcher is locked

holdenli at snf.stanford.edu holdenli at snf.stanford.edu
Sun Jul 15 07:58:23 PDT 2001


The etcher was stopped during process by the system.  Error message is "Lock not available alarm".
Wafer is still in the chamber.  Unable to retrieve wafer from the etcher.  Unable to rectify the problem.




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