Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine
yangxu at snf.stanford.edu
yangxu at snf.stanford.edu
Mon Jul 23 10:53:31 PDT 2001
1/5 of 4 inch wafer was broken of by clamps and was left inside the machine which can be seen visually on the center plate.
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