Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine

yangxu at snf.stanford.edu yangxu at snf.stanford.edu
Mon Jul 23 10:53:31 PDT 2001


1/5 of 4 inch wafer was broken of by clamps and was left inside the machine which can be seen visually on the center plate. 




More information about the stsetch-pcs mailing list