Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine

[latta at snf.stanford.edu]

Wafer removed, lid and lip seals replaced, oil added to blower.
O2clean recipe run.  Deep recipe run.  He pressure and flow
fine.  Gas flows fine.  Chamber pressure on the low side, but
within spec.  No resist burning observed.