Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine

latta at snf.stanford.edu latta at snf.stanford.edu
Mon Jul 23 04:14:52 PDT 2001


Wafer removed, lid and lip seals replaced, oil added to blower.
O2clean recipe run.  Deep recipe run.  He pressure and flow
fine.  Gas flows fine.  Chamber pressure on the low side, but
within spec.  No resist burning observed.




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