Problem stsetch 2001-07-21 16:51:29: backside cooling seems poor
latta at snf.stanford.edu
latta at snf.stanford.edu
Mon Jul 23 04:15:41 PDT 2001
Lip seal replaced. He pressure and flow ok. No resist burning
after 40 mins of DEEP recipe.
More information about the stsetch-pcs
mailing list