Shutdown stsetch 2001-07-24 15:24:33: Wafer fell off chuck during unload.
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Jul 24 03:24:34 PDT 2001
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Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine
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Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine
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