Shutdown stsetch 2001-07-24 15:24:33: Wafer fell off chuck during unload.
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Jul 24 04:58:30 PDT 2001
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Shutdown stsetch 2001-07-24 15:24:33: Wafer fell off chuck during unload.
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Shutdown stsetch 2001-07-25 12:28:22: Wafer pieces need to be removed....
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Wafer recovered, O2 clean run.
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Shutdown stsetch 2001-07-24 15:24:33: Wafer fell off chuck during unload.
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Shutdown stsetch 2001-07-25 12:28:22: Wafer pieces need to be removed....
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