Shutdown stsetch 2001-07-28 00:25:15:
latta at snf.stanford.edu
latta at snf.stanford.edu
Mon Jul 30 12:27:32 PDT 2001
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Shutdown stsetch 2001-07-28 00:25:15:
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Wafer bits removed, chamber vacuumed, user contacted, O2CLEAN run, DEEP run.
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Shutdown stsetch 2001-07-28 00:25:15:
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