July 2001 Archives by thread

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Starting: Sat Jul 14 03:13:04 PDT 2001
Ending: Mon Jul 30 12:27:32 PDT 2001
Messages: 31

• Problem stsetch 2001-07-14 15:13:02: Comm restored- system ok   ericp at snf.stanford.edu
  • Problem stsetch 2001-07-14 15:13:02: Comm restored- system ok   booth at snf.stanford.edu
• Problem stsetch 2001-07-14 11:13:24: Comm Lost - Wafer Inside   mbartsch at snf.stanford.edu
  • Problem stsetch 2001-07-14 11:13:24: Comm Lost - Wafer Inside   booth at snf.stanford.edu
• Comment stsetch 2001-07-15 16:13:26: STS fixed by A. Partridge   lmiller at snf.stanford.edu
• Problem stsetch 2001-07-15 16:14:22: STS fixed by A. Partridge   lmiller at snf.stanford.edu
  • Problem stsetch 2001-07-15 16:14:22: STS fixed by A. Partridge   booth at snf.stanford.edu
• Problem stsetch 2001-07-15 04:58:49: Hazy scum on wafers   mbartsch at snf.stanford.edu
  • Problem stsetch 2001-07-15 04:58:49: Hazy scum on wafers   booth at snf.stanford.edu
• Problem stsetch 2001-07-15 18:31:54: STS field serv. came!   ericp at snf.stanford.edu
  • Problem stsetch 2001-07-15 18:31:54: STS field serv. came!   booth at snf.stanford.edu
• Problem stsetch 2001-07-15 07:58:22: STS Etcher is locked   holdenli at snf.stanford.edu
  • Problem stsetch 2001-07-15 07:58:22: STS Etcher is locked   booth at snf.stanford.edu
• Problem stsetch 2001-07-17 16:20:44: PC locks up!   latta at snf.stanford.edu
  • Problem stsetch 2001-07-17 16:20:44: PC locks up!   cbaxter at snf.stanford.edu
• Problem stsetch 2001-07-18 11:03:45: he flow fluctuates a lot   wliu at snf.stanford.edu
  • Problem stsetch 2001-07-18 11:03:45: he flow fluctuates a lot   cbaxter at snf.stanford.edu
• Problem stsetch 2001-07-18 11:04:47: error while loading wafer   wliu at snf.stanford.edu
  • Problem stsetch 2001-07-18 11:04:47: error while loading wafer   cbaxter at snf.stanford.edu
• Problem stsetch 2001-07-18 23:13:50: Wafer loading   pindermu at snf.stanford.edu
  • Problem stsetch 2001-07-18 23:13:50: Wafer loading   cbaxter at snf.stanford.edu
• Problem stsetch 2001-07-21 16:51:29: backside cooling seems poor   ericp at snf.stanford.edu
  • Problem stsetch 2001-07-21 16:51:29: backside cooling seems poor   latta at snf.stanford.edu
• Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine   yangxu at snf.stanford.edu
  • Shutdown stsetch 2001-07-23 10:53:30: 1/5 of wafer broken inside the machine   latta at snf.stanford.edu
• Shutdown stsetch 2001-07-24 15:24:33: Wafer fell off chuck during unload.   latta at snf.stanford.edu
  • Shutdown stsetch 2001-07-24 15:24:33: Wafer fell off chuck during unload.   latta at snf.stanford.edu
• Shutdown stsetch 2001-07-25 12:28:22: Wafer pieces need to be removed....   latta at snf.stanford.edu
  • Shutdown stsetch 2001-07-25 12:28:22: Wafer pieces need to be removed....   latta at snf.stanford.edu
• Shutdown stsetch 2001-07-28 00:25:15:   lian at snf.stanford.edu
  • Shutdown stsetch 2001-07-28 00:25:15:   latta at snf.stanford.edu

Last message date: Mon Jul 30 12:27:32 PDT 2001
Archived on: Fri Jan 11 13:11:07 PST 2013

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