From dton at snf.stanford.edu Sat Jun 9 12:10:38 2001 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Jun 9, 2001 12:10:38 AM Subject: Problem stsetch 2001-06-09 00:10:36: No platen power Message-ID: No platen power during DEEP & SMOODEEP processes. Gave up using the tool after a few resume. From booth at snf.stanford.edu Mon Jun 11 08:16:18 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 11, 2001 8:16:18 AM Subject: Shutdown stsetch 2001-06-11 08:16:17: No RF power Message-ID: From booth at snf.stanford.edu Mon Jun 11 03:40:14 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 11, 2001 3:40:14 PM Subject: Shutdown stsetch 2001-06-11 08:16:17: No RF power Message-ID: Found intermittant loose connection. From booth at snf.stanford.edu Mon Jun 11 03:40:28 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 11, 2001 3:40:28 PM Subject: Problem stsetch 2001-06-09 00:10:36: No platen power Message-ID: From cbaxter at snf.stanford.edu Tue Jun 19 06:57:04 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 19, 2001 6:57:04 PM Subject: Shutdown stsetch 2001-06-19 18:57:03: need to recycled fomblin oil Message-ID: From cbaxter at snf.stanford.edu Tue Jun 19 07:20:03 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 19, 2001 7:20:03 PM Subject: Shutdown stsetch 2001-06-19 18:57:03: need to recycled fomblin oil Message-ID: add and recycled fomblin oil. 06/6. add 25/6 on dry pump. From jdas at snf.stanford.edu Wed Jun 27 01:20:42 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Jun 27, 2001 1:20:42 PM Subject: Comment stsetch 2001-06-27 13:20:41: C`STS trool is free from 1:30 till 4.30 Message-ID: Hi Messet up my resit mask during bonding wafer so can not use this time, sorry.