From booth at snf.stanford.edu  Mon Mar 12 03:01:49 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 12, 2001 3:01:49 PM
Subject: Shutdown stsetch 2001-03-12 15:01:48: Turbo off fault.
Message-ID: <mailman.193.1357938643.25867.stsetch-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Mar 12 03:10:38 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 12, 2001 3:10:38 PM
Subject: Shutdown stsetch 2001-03-12 15:01:48: Turbo off fault.
Message-ID: <mailman.194.1357938643.25867.stsetch-pcs@snf.stanford.edu>

Restarted software & Nancy unloaded wafer OK.



From dtchang at snf.stanford.edu  Tue Mar 13 10:30:29 2001
From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu)
Date: Mar 13, 2001 10:30:29 AM
Subject: Shutdown stsetch 2001-03-13 10:30:27: turbo pump down
Message-ID: <mailman.195.1357938643.25867.stsetch-pcs@snf.stanford.edu>

the turbo pump turned off after i loaded my wafer.



From dtchang at snf.stanford.edu  Tue Mar 13 10:31:05 2001
From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu)
Date: Mar 13, 2001 10:31:05 AM
Subject: Problem stsetch 2001-03-13 10:31:04: turbo pump off.
Message-ID: <mailman.196.1357938643.25867.stsetch-pcs@snf.stanford.edu>

the turbo pump shut off after i loaded my wafer.



From booth at snf.stanford.edu  Tue Mar 13 10:48:19 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 13, 2001 10:48:19 AM
Subject: Problem stsetch 2001-03-13 10:31:04: turbo pump off.
Message-ID: <mailman.197.1357938643.25867.stsetch-pcs@snf.stanford.edu>

redundant report.



From booth at snf.stanford.edu  Tue Mar 13 10:49:03 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 13, 2001 10:49:03 AM
Subject: Shutdown stsetch 2001-03-13 10:30:27: turbo pump down
Message-ID: <mailman.198.1357938643.25867.stsetch-pcs@snf.stanford.edu>

restarted system.



From dtchang at snf.stanford.edu  Fri Mar 16 05:58:59 2001
From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu)
Date: Mar 16, 2001 5:58:59 PM
Subject: Shutdown stsetch 2001-03-16 17:58:58: turbo down
Message-ID: <mailman.199.1357938643.25867.stsetch-pcs@snf.stanford.edu>

turbo pump shut down when i tried to unload my wafer.



From latta at snf.stanford.edu  Fri Mar 16 06:31:10 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Mar 16, 2001 6:31:10 PM
Subject: Shutdown stsetch 2001-03-16 17:58:58: turbo down
Message-ID: <mailman.200.1357938643.25867.stsetch-pcs@snf.stanford.edu>

Turbo re-started...



From vik at snf.stanford.edu  Mon Mar 19 12:00:29 2001
From: vik at snf.stanford.edu (vik at snf.stanford.edu)
Date: Mar 19, 2001 12:00:29 AM
Subject: Shutdown stsetch 2001-03-19 00:00:28: Broken Wafer
Message-ID: <mailman.201.1357938643.25867.stsetch-pcs@snf.stanford.edu>

Wafer pieces inside chamber.



From latta at snf.stanford.edu  Mon Mar 19 12:00:13 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Mar 19, 2001 12:00:13 PM
Subject: Shutdown stsetch 2001-03-19 00:00:28: Broken Wafer
Message-ID: <mailman.202.1357938643.25867.stsetch-pcs@snf.stanford.edu>

Broken wafer removed, O2 Clean performed.  Ok to use.



From pindermu at snf.stanford.edu  Wed Mar 21 07:37:46 2001
From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu)
Date: Mar 21, 2001 7:37:46 PM
Subject: Problem stsetch 2001-03-21 19:37:46: Low helium pressure
Message-ID: <mailman.203.1357938643.25867.stsetch-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Mar 21 08:29:33 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 21, 2001 8:29:33 PM
Subject: Problem stsetch 2001-03-21 19:37:46: Low helium pressure
Message-ID: <mailman.204.1357938643.25867.stsetch-pcs@snf.stanford.edu>

adjusted he flow...



From dtchang at snf.stanford.edu  Tue Mar 27 01:16:44 2001
From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu)
Date: Mar 27, 2001 1:16:44 PM
Subject: Shutdown stsetch 2001-03-27 13:16:43: wafer broken inside chamber
Message-ID: <mailman.205.1357938643.25867.stsetch-pcs@snf.stanford.edu>

my wafer broke inside the etch chamber.



From cbaxter at snf.stanford.edu  Tue Mar 27 05:07:21 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 27, 2001 5:07:21 PM
Subject: Shutdown stsetch 2001-03-27 13:16:43: wafer broken inside chamber
Message-ID: <mailman.206.1357938643.25867.stsetch-pcs@snf.stanford.edu>

vacuum broken wafer.  running  o2 clean..



From svargo at snf.stanford.edu  Sat Mar 31 09:35:56 2001
From: svargo at snf.stanford.edu (svargo at snf.stanford.edu)
Date: Mar 31, 2001 9:35:56 AM
Subject: Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok
Message-ID: <mailman.207.1357938643.25867.stsetch-pcs@snf.stanford.edu>

Small piece of wafer broke off in chamber, subsequent etching should be ok since not near clamping area.Email to Nancy for chamber opening on Monday.



From svargo at snf.stanford.edu  Sat Mar 31 09:36:39 2001
From: svargo at snf.stanford.edu (svargo at snf.stanford.edu)
Date: Mar 31, 2001 9:36:39 AM
Subject: Comment stsetch 2001-03-31 09:36:39: small wafer piece in chamber, etcher still ok to use
Message-ID: <mailman.208.1357938643.25867.stsetch-pcs@snf.stanford.edu>




From svargo at snf.stanford.edu  Sat Mar 31 10:50:27 2001
From: svargo at snf.stanford.edu (svargo at snf.stanford.edu)
Date: Mar 31, 2001 10:50:27 AM
Subject: Problem stsetch 2001-03-31 10:50:27: still ok to use
Message-ID: <mailman.209.1357938643.25867.stsetch-pcs@snf.stanford.edu>




From svargo at snf.stanford.edu  Sat Mar 31 10:50:43 2001
From: svargo at snf.stanford.edu (svargo at snf.stanford.edu)
Date: Mar 31, 2001 10:50:43 AM
Subject: Comment stsetch 2001-03-31 10:50:42: still ok to use.
Message-ID: <mailman.210.1357938643.25867.stsetch-pcs@snf.stanford.edu>