Shutdown stsetch 2001-03-12 15:01:48: Turbo off fault.
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Mar 12 03:10:38 PST 2001
Previous message:
Shutdown stsetch 2001-03-12 15:01:48: Turbo off fault.
Next message:
Shutdown stsetch 2001-03-13 10:30:27: turbo pump down
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Restarted software & Nancy unloaded wafer OK.
Previous message:
Shutdown stsetch 2001-03-12 15:01:48: Turbo off fault.
Next message:
Shutdown stsetch 2001-03-13 10:30:27: turbo pump down
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch-pcs mailing list