Shutdown stsetch 2001-03-13 10:30:27: turbo pump down
dtchang at snf.stanford.edu
dtchang at snf.stanford.edu
Tue Mar 13 10:30:29 PST 2001
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Shutdown stsetch 2001-03-12 15:01:48: Turbo off fault.
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Shutdown stsetch 2001-03-13 10:30:27: turbo pump down
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the turbo pump turned off after i loaded my wafer.
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Shutdown stsetch 2001-03-12 15:01:48: Turbo off fault.
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Shutdown stsetch 2001-03-13 10:30:27: turbo pump down
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