Problem stsetch 2001-03-13 10:31:04: turbo pump off.
dtchang at snf.stanford.edu
dtchang at snf.stanford.edu
Tue Mar 13 10:31:05 PST 2001
Previous message:
Shutdown stsetch 2001-03-13 10:30:27: turbo pump down
Next message:
Problem stsetch 2001-03-13 10:31:04: turbo pump off.
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
the turbo pump shut off after i loaded my wafer.
Previous message:
Shutdown stsetch 2001-03-13 10:30:27: turbo pump down
Next message:
Problem stsetch 2001-03-13 10:31:04: turbo pump off.
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch-pcs mailing list