Problem stsetch 2001-03-21 19:37:46: Low helium pressure
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Wed Mar 21 08:29:33 PST 2001
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Problem stsetch 2001-03-21 19:37:46: Low helium pressure
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adjusted he flow...
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Problem stsetch 2001-03-21 19:37:46: Low helium pressure
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Shutdown stsetch 2001-03-27 13:16:43: wafer broken inside chamber
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