Shutdown stsetch 2001-03-27 13:16:43: wafer broken inside chamber
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Mar 27 05:07:21 PST 2001
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Shutdown stsetch 2001-03-27 13:16:43: wafer broken inside chamber
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Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok
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vacuum broken wafer. running o2 clean..
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Shutdown stsetch 2001-03-27 13:16:43: wafer broken inside chamber
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Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok
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