Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok

svargo at snf.stanford.edu svargo at snf.stanford.edu
Sat Mar 31 09:35:56 PST 2001


Small piece of wafer broke off in chamber, subsequent etching should be ok since not near clamping area.Email to Nancy for chamber opening on Monday.




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