Comment stsetch 2001-03-31 09:36:39: small wafer piece in chamber, etcher still ok to use
svargo at snf.stanford.edu
svargo at snf.stanford.edu
Sat Mar 31 09:36:39 PST 2001
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Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok
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Problem stsetch 2001-03-31 10:50:27: still ok to use
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Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok
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